Built-in positioning error compensation

Supports multiple laser interferometer file formats (RTL/CPS), max 2,000 points, 0.01 µm compensation precision.

Test Parameters:

Compensation range: 800 mm

Point spacing: 40 mm, 21 points total

Overrun: 1 mm

Origin: Z-signal at hard limit

Bidirectional accuracy: 144 µm

Repeatability: 5 µm

Systematic error: 142 µm

Bidirectional accuracy: 5.6 µm

Repeatability: 3.7 µm

Systematic error: 3.28 µm

Result: Meets customer requirements.