Gantry Synchronization
Gantry Synchronization - Semiconductor & Inspection Equipment

HR5 rotary (pulse/EtherCAT) and HD5 direct-drive (pulse/EtherCAT) servos support optional gantry sync function for both rigid and flexible gantry control. 


15M high-speed inter-axis communication for real-time triple-loop data exchange.


Fast cross-decoupling gantry sync algorithm enables real-time dual-drive synchronization Unique position sync decoupling control continuously detects mechanical deviation for dynamic compensation — meeting higher precision and response gantry. 


Paired with linear motors on gantry systems — acceleration up to 4G, speed exceeding 4 m/s.

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Gantry Synchronization

Running speed: 1,500 mm/s

Acceleration/deceleration time: 100 ms

Positioning following error: ±5 encoder counts

Settling time: ≤37.5 ms (exceeding customer's 50 ms expectation)

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Gantry Synchronization
    
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Gantry Synchronization
    
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Address:No.289, Xukou Town, Wuzhong Dist, Suzhou City